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Damage free removal of 10nm contaminant particles from a wafer surface using a supersonic CO2 particle beam
- Title
- Damage free removal of 10nm contaminant particles from a wafer surface using a supersonic CO2 particle beam
- Date Issued
- 2011-06-02
- Publisher
- 대한기계학회
- Article Type
- Conference
- Citation
- US-Korea Joint Symposium on nano technology, 2011-06-02
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg