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고품질 단결정 실리콘 현수 구조물 제작 기술
- Title
- 고품질 단결정 실리콘 현수 구조물 제작 기술
- Date Issued
- 2012-04-07
- Publisher
- 마이크로나노시스템학회
- Article Type
- Conference
- Citation
- The 14th Korean MEMS Conference, 2012-04-07
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Related Researcher
- 김준원KIM, JOON WON
- Dept of Mechanical Enginrg