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고배율 공진형 가속도계의 설계, 제작, 시험
- Title
- 고배율 공진형 가속도계의 설계, 제작, 시험
- Date Issued
- 2012-04-06
- Publisher
- 마이크로나노시스템학회
- Article Type
- Conference
- Citation
- The 14th Korean MEMS Conference, 2012-04-06
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