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A cost-effective laser interference lithography using 30mW AlInGaN semiconductor laser
- Title
- A cost-effective laser interference lithography using 30mW AlInGaN semiconductor laser
- Date Issued
- 2009-11-23
- Publisher
- International Conference on Laser Ablation
- Article Type
- Conference
- Citation
- 10th International Conference on Laser Ablation 2009, 2009-11-23
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