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Silicate Replica Molds from Polysilazane and Sol-Gel Hybrid Resin for Nanoimprint Lithography
- Title
- Silicate Replica Molds from Polysilazane and Sol-Gel Hybrid Resin for Nanoimprint Lithography
- Authors
- 김동표
- Date Issued
- 2010-08-20
- Publisher
- Center for Nanoscale Mechatronics & Manufacturing
- Article Type
- Conference
- Citation
- The 5th International Symposium on Nanoscale Mechantronics&Manufacturing, 2010-08-20
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Related Researcher
- 김동표KIM, DONG PYO
- Dept. of Chemical Enginrg