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Locking Actuator of Comb Electrode for Enhanced Sensitivity of Vibrating MEMS Gyroscope
- Title
- Locking Actuator of Comb Electrode for Enhanced Sensitivity of Vibrating MEMS Gyroscope
- Date Issued
- 2012-09-23
- Publisher
- JCK MEMS
- Article Type
- Conference
- Citation
- JCK MEMS, 2012-09-23
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg