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MD simulations on the momentum transfer to nano contaminant particle on wafer surface in collisions with cleaning bullets
- Title
- MD simulations on the momentum transfer to nano contaminant particle on wafer surface in collisions with cleaning bullets
- Date Issued
- 2012-06-20
- Publisher
- NanoTech
- Article Type
- Conference
- Citation
- NanoTech 2012, 2012-06-20
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg