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초음속 나노입자빔을 이용한 실리콘 웨이퍼 표면오염입자(10nm) 제거 실험ㄴ
- Title
- 초음속 나노입자빔을 이용한 실리콘 웨이퍼 표면오염입자(10nm) 제거 실험ㄴ
- Date Issued
- 2012-02-16
- Publisher
- 한국반도체 협회
- Article Type
- Conference
- Citation
- 제19회 한국반도체 학술대회, 2012-02-16
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg