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Dimensional Analyses of Dopants in Fin Structure By using Atom Probe Tomography
- Title
- Dimensional Analyses of Dopants in Fin Structure By using Atom Probe Tomography
- Date Issued
- 2012-02-05
- Publisher
- APMC
- Article Type
- Conference
- Citation
- APMC 2012, 2012-02-05
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg