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Extension of the Transition Layer at the Vertical Interface of Si/SiO2 observed in Atom Probe Tomography
- Title
- Extension of the Transition Layer at the Vertical Interface of Si/SiO2 observed in Atom Probe Tomography
- Date Issued
- 2012-05-21
- Publisher
- IFES
- Article Type
- Conference
- Citation
- IFES 2012, 2012-05-21
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg