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1차원 입자코드를 이용한 Capacitively Coupled Plasmas 소스의 해석
- Title
- 1차원 입자코드를 이용한 Capacitively Coupled Plasmas 소스의 해석
- Authors
- 정태린
- Date Issued
- 2003
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906232
https://oasis.postech.ac.kr/handle/2014.oak/6452
- Article Type
- Thesis
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