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Al2O3/TiO2 multilayer thin film encapsulation for OLED using PEALD process
- Title
- Al2O3/TiO2 multilayer thin film encapsulation for OLED using PEALD process
- Date Issued
- 2013-08-25
- Publisher
- SPIE
- Article Type
- Conference
- Citation
- SPIE - the international society for optics and photonics, 2013-08-25
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Related Researcher
- 박찬언PARK, CHAN EON
- Dept. of Chemical Enginrg