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Atom Probe Tomography Analyses of Thin poly-Si/SiO2 Multi-layer and Appropriate
- Title
- Atom Probe Tomography Analyses of Thin poly-Si/SiO2 Multi-layer and Appropriate
- Date Issued
- 2013-10-24
- Publisher
- 대한금속재료학회
- Article Type
- Conference
- Citation
- 추계 금속재료학회, 2013-10-24
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg