Characteristics of 1st and 2nd ECR Heating in a plasma source with belt-type magnet assembly and slit antennas
- Title
- Characteristics of 1st and 2nd ECR Heating in a plasma source with belt-type magnet assembly and slit antennas
- Authors
- 조무현
- Date Issued
- 2014-07-09
- Publisher
- 한국진공학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/67321
- Article Type
- Conference
- Citation
- International Conference on Microelectronics and Plasma Technology 2014, 2014-07-09
- Files in This Item:
- There are no files associated with this item.
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