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OPTIMIZATION OF TWO-DIMENSIONAL GRID ELECTRODE GEOMETRY FOR BALLISTIC-MODE PLASMA IMMERSION ION IMPLANTATION
- Title
- OPTIMIZATION OF TWO-DIMENSIONAL GRID ELECTRODE GEOMETRY FOR BALLISTIC-MODE PLASMA IMMERSION ION IMPLANTATION
- Authors
- 조무현
- Date Issued
- 2014-05-27
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- The 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams, 2014-05-27
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Related Researcher
- 조무현CHO, MOO HYUN
- Div. of Advanced Nuclear Enginrg