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정전부양형 MEMS 자이로스코프의 제작 및 시험

Title
정전부양형 MEMS 자이로스코프의 제작 및 시험
Authors
임근배석세영이종민송형민이상우성상경
Date Issued
2014-06-19
Publisher
국방과학연구소,한국군사과학기술학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/67923
Article Type
Conference
Citation
2014년 한국군사과학기술학회 종합학술대회, 2014-06-19
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