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Tracking control for piezo-actuated stage using sliding mode controller with observer-based hysteresis compensation
- Title
- Tracking control for piezo-actuated stage using sliding mode controller with observer-based hysteresis compensation
- Authors
- 원상철; Taufiq Muhammadi; 권우경
- Date Issued
- 2013-06-24
- Publisher
- ACA
- Article Type
- Conference
- Citation
- ASCC 2013, 2013-06-24
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