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Thesis
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dc.contributor.author김관수en_US
dc.date.accessioned2015-02-24T15:37:08Z-
dc.date.available2015-02-24T15:37:08Z-
dc.date.issued2003en_US
dc.identifier.otherOAK-2015-04463en_US
dc.identifier.urihttp://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906625en_US
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/6843-
dc.descriptionMasteren_US
dc.languagekoren_US
dc.publisher포항공과대학교en_US
dc.rightsBY_NC_NDen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/2.0/kren_US
dc.title저온에서의 (Hexafluoroacetylacetonate)Cu(I) (3,3- dimethyl-1-butene)를 이용한 Cu 박막의 펄스주입형 유기금속화학en_US
dc.title.alternativeLow temperature Cu thin film growth by pulsed metal-organic chemical vapor deposition using (hexafluoroacetylacetonate)Cu(I)(3,3-dimethyl-1-butene)en_US
dc.typeThesisen_US
dc.contributor.college일반대학원 화학공학과en_US
dc.date.degree2003-02en_US
dc.type.docTypeThesis-

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