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Atom probe tomography를 이용한 산화물계면의 산소분포분석과 다층박막산화물 선택소자의 동작특성
- Title
- Atom probe tomography를 이용한 산화물계면의 산소분포분석과 다층박막산화물 선택소자의 동작특성
- Date Issued
- 2014-11-13
- Publisher
- 한국현미경학회
- Article Type
- Conference
- Citation
- 2014 추계 현미경학회, 2014-11-13
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg