Preventinig Fe catalyst migration using Fe ion implantation on Si wafers
- Title
- Preventinig Fe catalyst migration using Fe ion implantation on Si wafers
- Authors
- 이철훈; 이재근; 이건홍
- Date Issued
- 2015-06-03
- Publisher
- Korean Carbon Society
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/71442
- Article Type
- Conference
- Citation
- Korean Carbon Society spring meeting, 2015-06-03
- Files in This Item:
- There are no files associated with this item.
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