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양극 산화 알루미나 나노 틀을 이용한 MEMS용 2차 구조물 제작
- Title
- 양극 산화 알루미나 나노 틀을 이용한 MEMS용 2차 구조물 제작
- Authors
- 지상은
- Date Issued
- 2004
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906933
https://oasis.postech.ac.kr/handle/2014.oak/7151
- Article Type
- Thesis
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