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Extended universal and Scaling law for micro-sized RF gas breakdown
- Title
- Extended universal and Scaling law for micro-sized RF gas breakdown
- Date Issued
- 2016-06-30
- Publisher
- Institute of Space and Plasma Sciences, National Cheng Kung University, Tainan, Taiwan
- Article Type
- Conference
- Citation
- The 18th International Congress on Plasma Physic, 2016-06-30
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- 윤건수YUN, GUNSU
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