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Nanomaterials fabrication using atomic layer deposition

Title
Nanomaterials fabrication using atomic layer deposition
Authors
김형준
Date Issued
2008-04-24
Publisher
대한 금속 재료 학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/72473
Article Type
Conference
Citation
대한 금속 재료학회 반도체 심포지엄, 2008-04-24
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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