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Nickel and Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
- Title
- Nickel and Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
- Authors
- 김형준
- Date Issued
- 2008-03-01
- Publisher
- MRS
- Article Type
- Conference
- Citation
- MRS 2008, 2008-03-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg