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The benefits of PE-ALD for applications in nanoscale semiconductor device fabrication
- Title
- The benefits of PE-ALD for applications in nanoscale semiconductor device fabrication
- Authors
- 김형준
- Date Issued
- 2007-12-12
- Publisher
- International Conference on Advanced Materials and Devices
- Article Type
- Conference
- Citation
- The 5th International Conference on Advanced Materials and Devices, 2007-12-12
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg