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Ru nanostructures using highly conformal Ru ALD and AAO for nanoelectronic applications
- Title
- Ru nanostructures using highly conformal Ru ALD and AAO for nanoelectronic applications
- Authors
- 김형준
- Date Issued
- 2007-10-01
- Publisher
- ADMETA
- Article Type
- Conference
- Citation
- ADMETA 2007, 2007-10-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg