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In-situ doping during ZnO atomic layer deposition

Title
In-situ doping during ZnO atomic layer deposition
Authors
김형준
Date Issued
2007-09-10
Publisher
한국재료학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/72530
Article Type
Conference
Citation
The 13th International Conference on II-VI compounds, 2007-09-10
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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