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Nanomaterial Fabircation by Ru Atomic Layer Deposition on Anodic Aluminum Oxide Template
- Title
- Nanomaterial Fabircation by Ru Atomic Layer Deposition on Anodic Aluminum Oxide Template
- Authors
- 김형준
- Date Issued
- 2006-10-01
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- IEEE Nanotechnology Materials and Devices Conference 2006, 2006-10-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg