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Study on Nucleation Behavior of ALD Ru Thin Films on Various Substrates
- Title
- Study on Nucleation Behavior of ALD Ru Thin Films on Various Substrates
- Authors
- 김형준
- Date Issued
- 2006-10-01
- Publisher
- 대한금속 재료학회
- Article Type
- Conference
- Citation
- 2006 Fall Conference of the Korean Institute of Metals and Materials, 2006-10-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg