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ZnO thin films grown by atomic layer deposition and comparisons with sputtering for transparent thin film transistor fabrication

Title
ZnO thin films grown by atomic layer deposition and comparisons with sputtering for transparent thin film transistor fabrication
Authors
김형준
Date Issued
2006-06-01
Publisher
European Materials Research Society
URI
https://oasis.postech.ac.kr/handle/2014.oak/72844
Article Type
Conference
Citation
European Materials Research Society, 2006-06-01
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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