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The applications of atomic layer deposition to nanodevices and nanotechnology
- Title
- The applications of atomic layer deposition to nanodevices and nanotechnology
- Authors
- 김형준
- Date Issued
- 2005-10-01
- Article Type
- Conference
- Citation
- The 9th Korea-China Workshop on Advanced Materials, 2005-10-01
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Communities & Collection
Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg