Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The ALD of various oxides from alkylamide precursors: the growth and film properties
- Title
- The ALD of various oxides from alkylamide precursors: the growth and film properties
- Authors
- 김형준
- Date Issued
- 2005-08-01
- Article Type
- Conference
- Citation
- 5th American Vacuum Society Topical Conference on Atomic Layer Deposition, 2005-08-01
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg