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상호 간섭이 최소화된 고속 원자현미경용 XY 스캐너 제작
- Title
- 상호 간섭이 최소화된 고속 원자현미경용 XY 스캐너 제작
- Authors
- 문원규
- Date Issued
- 2005-01-01
- Publisher
- 한국정밀공학회
- Article Type
- Conference
- Citation
- 한국정밀공학회 2005년도 춘계학술대회, 2005-01-01
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg