Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
PE-ALD를 이용한 질화물 박막의 나노디바이스에의 응용
- Title
- PE-ALD를 이용한 질화물 박막의 나노디바이스에의 응용
- Authors
- 김형준
- Date Issued
- 2004-10-01
- Publisher
- 한국세라믹학회
- Article Type
- Conference
- Citation
- 한국세라믹학회 추계연구발표회, 2004-10-01
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg