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Low temperature conformal Cu and WN film growth by MOCVD
- Title
- Low temperature conformal Cu and WN film growth by MOCVD
- Authors
- 용기중
- Date Issued
- 2003-05-22
- Publisher
- KIChE
- Article Type
- Conference
- Citation
- Korea-Japan Symposium on Materials, 2003-05-22
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg