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The effect of oxidation annealing on reduction of plasma-induced-damage in AlGaN/GaN heterostructure
- Title
- The effect of oxidation annealing on reduction of plasma-induced-damage in AlGaN/GaN heterostructure
- Authors
- 이종람
- Date Issued
- 2003-05-01
- Article Type
- Conference
- Citation
- ICNS-5, 2003-05-01
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Related Researcher
- 이종람LEE, JONG LAM
- Dept of Materials Science & Enginrg