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Thermal decomposition and desorption study of tetrakis(diethylamido)zirconium on Si(100) for MOCVD and ALD of ZrO2
- Title
- Thermal decomposition and desorption study of tetrakis(diethylamido)zirconium on Si(100) for MOCVD and ALD of ZrO2
- Authors
- 용기중
- Date Issued
- 2002-11-06
- Article Type
- Conference
- Citation
- AVS 49th International Symposium, 2002-11-06
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg