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The PE-ALD of Ta Based Metals/Nitrides: The Growth, Materials Properties, and Applications to Future Device Fabrication
- Title
- The PE-ALD of Ta Based Metals/Nitrides: The Growth, Materials Properties, and Applications to Future Device Fabrication
- Authors
- 김형준
- Date Issued
- 2002-11-01
- Article Type
- Conference
- Citation
- American Vacuum Society, 2002-11-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg