The Growth and Properties of PE-ALD Ta and TaN thin Films
- Title
- The Growth and Properties of PE-ALD Ta and TaN thin Films
- Authors
- 김형준
- Date Issued
- 2002-08-01
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/74358
- Article Type
- Conference
- Citation
- American Vacuum Society, 2002-08-01
- Files in This Item:
- There are no files associated with this item.
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