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ZrO2 화학증착 관련 표면화학: TDEAZr(Zr(N(C2H5)2)4)과 알코올의 Si(100) 표면분해반응 연구
- Title
- ZrO2 화학증착 관련 표면화학: TDEAZr(Zr(N(C2H5)2)4)과 알코올의 Si(100) 표면분해반응 연구
- Authors
- 용기중
- Date Issued
- 2002-06-01
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- 제 1 회 나노화학공정 심포지움, page. 54, 2002-06-01
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg