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Fabrication and thermal stability of W, WNx diffusion barriers in the low-k integration structure
- Title
- Fabrication and thermal stability of W, WNx diffusion barriers in the low-k integration structure
- Authors
- 용기중
- Date Issued
- 2006-04-21
- Publisher
- 화학공학회
- Article Type
- Conference
- Citation
- 한국화학공학회 2006년 봄 학술대회, 2006-04-21
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg