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Ultra thin ZrSiO with compositional gradation grown on Si(100) using Zr(N(C2H5)2)4 and Si(OC4H9)4
- Title
- Ultra thin ZrSiO with compositional gradation grown on Si(100) using Zr(N(C2H5)2)4 and Si(OC4H9)4
- Authors
- 용기중
- Date Issued
- 2004-04-01
- Publisher
- 화학공학회
- Article Type
- Conference
- Citation
- 화학공학회 2004 봄 정기학술대회, 2004-04-01
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg