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Analytic Model and Simulation of Single- and Dual-frequency Capacitively Coupled RF Discharge
- Title
- Analytic Model and Simulation of Single- and Dual-frequency Capacitively Coupled RF Discharge
- Authors
- 이재구
- Date Issued
- 2003-10-01
- Article Type
- Conference
- Citation
- 물리학회(경북대 개최), 2003-10-01
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