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ConformCu film growth by pulsed-MOCVD using (hfac)Cu(DMB) and (hfac)Cu(VTMS)
- Title
- ConformCu film growth by pulsed-MOCVD using (hfac)Cu(DMB) and (hfac)Cu(VTMS)
- Authors
- 용기중
- Date Issued
- 2003-04-25
- Publisher
- 한국화공학회
- Article Type
- Conference
- Citation
- 화학공학회 2003 봄 정기학술대회, 2003-04-25
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg