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The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
- Title
- The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
- Authors
- 김형준
- Date Issued
- 2002-04-01
- Publisher
- Material Research Society
- Article Type
- Conference
- Citation
- Mat. Res. Soc., 2002-04-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg