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DLI-MOCVD 공정을 이용한 SBT 박막 증착 및 전구체 특성 평가

Title
DLI-MOCVD 공정을 이용한 SBT 박막 증착 및 전구체 특성 평가
Authors
용기중
Date Issued
2001-04-01
Publisher
한국화학공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/75890
Article Type
Conference
Citation
Theories and Applications of Chemical Engineering, 2001-04-01
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용기중YONG, KIJUNG
Dept. of Chemical Enginrg
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