DLI-MOCVD 공정을 이용한 SBT 박막 증착 및 전구체 특성 평가
- Title
- DLI-MOCVD 공정을 이용한 SBT 박막 증착 및 전구체 특성 평가
- Authors
- 용기중
- Date Issued
- 2001-04-01
- Publisher
- 한국화학공학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/75890
- Article Type
- Conference
- Citation
- Theories and Applications of Chemical Engineering, 2001-04-01
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.