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He/O2 플라즈마 전처리를 통한 산화막 계면 특성 개선 효과
- Title
- He/O2 플라즈마 전처리를 통한 산화막 계면 특성 개선 효과
- Authors
- 이시우
- Date Issued
- 2000-10-20
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- 한국화학공학회지, page. 4689, 2000-10-20
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