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분류규칙 기반의 반도체 wafer map의 결함패턴 탐지
- Title
- 분류규칙 기반의 반도체 wafer map의 결함패턴 탐지
- Authors
- 전치혁
- Date Issued
- 2005-11-25
- Publisher
- 대한산업공학회
- Article Type
- Conference
- Citation
- 대한산업공학회 2005년 추계학술대회, 2005-11-25
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Related Researcher
- 전치혁JUN, CHI HYUCK
- Dept of Industrial & Management Enginrg