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The application of ALD for metallization of 65nm and beyond
- Title
- The application of ALD for metallization of 65nm and beyond
- Authors
- 김형준
- Date Issued
- 2004-11-01
- Publisher
- Asian Conference on Chemical Vapor Deposition
- Article Type
- Conference
- Citation
- The 3rd Asian Conference on Chemical Vapor Deposition, 2004-11-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg